Invention Grant
- Patent Title: Wafer prober
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Application No.: US16960635Application Date: 2019-01-15
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Publication No.: US11262380B2Publication Date: 2022-03-01
- Inventor: Nam Woo Park , Ki Tack Park
- Applicant: SEMICS INC.
- Applicant Address: KR Gwangju-si
- Assignee: SEMICS INC.
- Current Assignee: SEMICS INC.
- Current Assignee Address: KR Gwangju-si
- Agency: Cantor Colburn LLP
- Priority: KR10-2018-0007106 20180119,KR10-2019-0005013 20190115
- International Application: PCT/KR2019/000573 WO 20190115
- International Announcement: WO2019/143091 WO 20190725
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04 ; H01L21/687

Abstract:
Provided is a wafer prober. The wafer probing stage of the wafer prober includes: a lower plate; a plurality of lifting pillars mounted on an upper surface of the lower plate; and an upper plate mounted on upper ends of the plurality of lifting pillars, wherein the plurality of lifting pillars are located between the upper plate and the lower plate and ends of the lifting pillars are configured to lift up and down in a vertical direction, and wherein a height and a slope of the upper plate are adjusted according to heights of the lifting pillars. The wafer probing stage can adjust a height of the chuck arranged on the upper plate and a slope or flatness of the chuck by adjusting a height of each lifting pillar according to a weight applied to each lifting pillar.
Public/Granted literature
- US20200348335A1 WAFER PROBER Public/Granted day:2020-11-05
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