Invention Grant
- Patent Title: Device for positioning a semiconductor die in a wafer prober
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Application No.: US16739509Application Date: 2020-01-10
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Publication No.: US11262381B2Publication Date: 2022-03-01
- Inventor: Otto Andreas Torreiter , Jörg Georg Appinger , Martin Eckert , Quintino Lorenzo Trianni
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent Kristofer L. Haggerty
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R31/28

Abstract:
The invention relates to a device for positioning a semiconductor die in a wafer prober, the device comprising a carrier plate and a clamp on a front surface of the carrier plate, the dimensions of the carrier plate matching a standard geometry required by the wafer prober for receiving a semiconductor wafer to be probed by the wafer prober, the clamp being reversibly movable against a force of an elastic element between an open position and a closed position, the clamp being adapted for fixing the die on the carrier plate in the closed position and for releasing the die in the open position.
Public/Granted literature
- US20210215738A1 DEVICE FOR POSITIONING A SEMICONDUCTOR DIE IN A WAFER PROBER Public/Granted day:2021-07-15
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