Invention Grant
- Patent Title: Fine pitch probe card methods and systems
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Application No.: US16461387Application Date: 2016-12-23
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Publication No.: US11262384B2Publication Date: 2022-03-01
- Inventor: Pooya Tadayon , David Shia
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP.
- International Application: PCT/US2016/068470 WO 20161223
- International Announcement: WO2018/118075 WO 20180628
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28

Abstract:
An embodiment includes an apparatus comprising: a substrate including a surface that comprises first, second, and third apertures; and first, second, and third probes comprising proximal ends that are respectively included within and project from the first, second, and third apertures; wherein the first, second, and third probes: (a)(i) intersect a plane that is generally coplanar with the surface, (a)(ii) include distal ends configured to contact electrical contacts of a device under test (DUT), and (a)(iii) are generally linear and each include a major axis that is non-orthogonal to the plane. Other embodiments are described herein.
Public/Granted literature
- US20190310287A1 FINE PITCH PROBE CARD METHODS AND SYSTEMS Public/Granted day:2019-10-10
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