Invention Grant
- Patent Title: Method for inspecting piezoelectric element
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Application No.: US16814206Application Date: 2020-03-10
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Publication No.: US11262394B2Publication Date: 2022-03-01
- Inventor: Hiroki Obata , Masayuki Uetani , Ryusuke Ikeda
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JPJP2017-174832 20170912
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L41/083

Abstract:
Provided is a method for inspecting a piezoelectric element in which voltage is applied to a piezoelectric element and evaluation of the electrical characteristics of the piezoelectric element is performed. The method includes a first step in which the piezoelectric element is held on a flat plate-shaped slightly adhesive sheet and a second step in which voltage is applied to the piezoelectric element held on the slightly adhesive sheet and evaluation of the electrical characteristics of the piezoelectric element is performed.
Public/Granted literature
- US20200209302A1 METHOD FOR INSPECTING PIEZOELECTRIC ELEMENT Public/Granted day:2020-07-02
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