Invention Grant
- Patent Title: Method of determining whether a silicon-carbide semiconductor device is a conforming product
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Application No.: US16806614Application Date: 2020-03-02
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Publication No.: US11262399B2Publication Date: 2022-03-01
- Inventor: Masaki Miyazato
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Rabin & Berdo, P.C.
- Priority: JPJP2019-047714 20190314
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L29/16 ; H01L29/78

Abstract:
A method of determining whether a silicon-carbide semiconductor device, which has a metal oxide semiconductor (MOS) gate structure and a built-in diode, is a conforming product. The method includes measuring an ON voltage of the silicon carbide semiconductor device, passing a forward current through the built-in diode of the silicon carbide semiconductor device, measuring another ON voltage of the silicon carbide semiconductor device, which is the ON voltage of the silicon carbide semiconductor device after passing the forward current, calculating a rate of change between the ON voltage and the another ON voltage, and determining that the silicon carbide semiconductor device is a conforming product unless the calculated rate of change is less than 3%.
Public/Granted literature
- US20200292612A1 METHOD OF DETERMINING WHETHER A SILICON-CARBIDE SEMICONDUCTOR DEVICE IS A CONFORMING PRODUCT Public/Granted day:2020-09-17
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