Invention Grant
- Patent Title: Shielding for probing system
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Application No.: US16864861Application Date: 2020-05-01
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Publication No.: US11262400B2Publication Date: 2022-03-01
- Inventor: Choon Leong Lou
- Applicant: TECAT TECHNOLOGIES (SUZHOU) LIMITED
- Applicant Address: CN Suzhou
- Assignee: TECAT TECHNOLOGIES (SUZHOU) LIMITED
- Current Assignee: TECAT TECHNOLOGIES (SUZHOU) LIMITED
- Current Assignee Address: CN Suzhou
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN202010263758 20200407
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/067

Abstract:
A probing system includes a chuck configured to support a device under test (DUT); a probe card disposed above the chuck and including a plurality of probes protruding from the probe card toward the chuck; and a platen disposed between the chuck and the probe card and configured to support the probe card, wherein the chuck includes a shielding member disposed between the platen and the chuck.
Public/Granted literature
- US20210311111A1 SHIELDING FOR PROBING SYSTEM Public/Granted day:2021-10-07
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