Invention Grant
- Patent Title: System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
-
Application No.: US16186320Application Date: 2018-11-09
-
Publication No.: US11262591B2Publication Date: 2022-03-01
- Inventor: Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B27/09
- IPC: G02B27/09 ; H05H1/24 ; H05H1/02 ; G02B5/00 ; H05G2/00 ; H01S3/00 ; H01S3/16

Abstract:
A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
Public/Granted literature
Information query