Invention Grant
- Patent Title: Apparatus for storing mask
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Application No.: US16901466Application Date: 2020-06-15
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Publication No.: US11262649B2Publication Date: 2022-03-01
- Inventor: Ginam Park , Sangmin Kim , Jongsam Kim , Hongjin Kim , Chuljun Park , Yongjun Ahn , Sangkyung Lee , Junyong Lee , Taijo Jeon , Kyubum Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0092533 20190730
- Main IPC: G03F1/66
- IPC: G03F1/66 ; B01D46/00 ; B01D46/44 ; F25B21/02 ; F24F3/14 ; H05B1/02 ; F24H3/04 ; B01D46/42 ; B01D50/00

Abstract:
An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.
Public/Granted literature
- US20210033965A1 APPARATUS FOR STORING MASK Public/Granted day:2021-02-04
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