Invention Grant
- Patent Title: Image sensor, position sensor device, lithography system, and method for operating an image sensor
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Application No.: US16987504Application Date: 2020-08-07
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Publication No.: US11262660B2Publication Date: 2022-03-01
- Inventor: Jan Horn , Ulrich Bihr , Andy Zott , Markus Deguenther
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102018202096.5 20180212
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
An image sensor for a position sensor apparatus for ascertaining a position of at least one mirror of a lithography apparatus includes: a plurality of integrated optical waveguides; a plurality of incoupling areas; a multiplexer apparatus; and an image reconstruction apparatus.
Information query
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