Invention Grant
- Patent Title: Tubular linear actuator, patterning device masking device and lithographic apparatus
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Application No.: US17050240Application Date: 2019-03-21
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Publication No.: US11262663B2Publication Date: 2022-03-01
- Inventor: Peter Michel Silvester Maria Heijmans , Olof Martinus Josephus Fischer , Maarten Hartger Kimman , Edwin Van Horne , Antonie Hendrik Verweij
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.
- Priority: EP18169161 20180425
- International Application: PCT/EP2019/057041 WO 20190321
- International Announcement: WO2019/206531 WO 20191031
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02K41/03

Abstract:
The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
Public/Granted literature
- US20210080840A1 Tubular Linear Actuator, Patterning Device Masking Device and Lithographic Apparatus Public/Granted day:2021-03-18
Information query
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