Invention Grant
- Patent Title: Frequency broadening apparatus and method
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Application No.: US16827843Application Date: 2020-03-24
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Publication No.: US11262665B2Publication Date: 2022-03-01
- Inventor: Patrick Sebastian Uebel , Sebastian Thomas Bauerschmidt , Paul William Scholtes-Van Eijk
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP19164997 20190325,EP19207621 20191107
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/20 ; G02B6/02 ; G02F1/365

Abstract:
An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.
Public/Granted literature
- US20200310251A1 Frequency Broadening Apparatus and Method Public/Granted day:2020-10-01
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