Invention Grant
- Patent Title: Conductive diffuser and manufacturing method of the same
-
Application No.: US16916709Application Date: 2020-06-30
-
Publication No.: US11264243B2Publication Date: 2022-03-01
- Inventor: Hiroki Watanabe
- Applicant: CoorsTek KK
- Applicant Address: JP Tokyo
- Assignee: CoorsTek KK
- Current Assignee: CoorsTek KK
- Current Assignee Address: JP Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JPJP2019-123711 20190702,JPJP2019-224976 20191213,JPJP2020-082385 20200508
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L21/50
Abstract:
A diffuser includes a diffuser element made of silicon carbide having conductivity, conductive holding members for holding the diffuser element, conductive gaskets that seal between the diffuser element and the holding members. Static electricity on the diffuser element is eliminated through the gaskets, and the holding members.
Public/Granted literature
- US20210005458A1 DIFFUSER AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2021-01-07
Information query
IPC分类:
