Invention Grant
- Patent Title: Microwave integrated circuit
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Application No.: US16815827Application Date: 2020-03-11
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Publication No.: US11264341B2Publication Date: 2022-03-01
- Inventor: Kenshi Naito
- Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Applicant Address: JP Kanagawa
- Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Current Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- Current Assignee Address: JP Kanagawa
- Agency: Smith, Gambrell & Russell, LLP.
- Priority: JPJP2019-045545 20190313,JPJP2019-045547 20190313
- Main IPC: H01L23/49
- IPC: H01L23/49 ; H01L23/52 ; H01L23/66 ; H01L23/498 ; H01L23/522

Abstract:
Provided is a microwave integrated circuit including: a semiconductor substrate; a plurality of amplification units that are formed in the semiconductor substrate; a wiring that is formed in one layer wiring excluding an uppermost layer wiring and a lowermost layer wiring among a plurality of layer wirings formed on the semiconductor substrate and is used for supplying power to the plurality of amplification units; and a plurality of vias that connect a plurality of conductive regions formed in the layer wiring with the wiring interposed therebetween and other conductive regions formed in a region interposing the wiring in the two layer wirings immediately above and immediately below the layer wiring, in which each of the plurality of vias forms a via structure connected to the conductive regions of the lowermost layer wiring by a plurality of other vias.
Public/Granted literature
- US20200294941A1 MICROWAVE INTEGRATED CIRCUIT Public/Granted day:2020-09-17
Information query
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