Invention Grant
- Patent Title: Chip package structure with seal ring structure
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Application No.: US17019651Application Date: 2020-09-14
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Publication No.: US11264363B2Publication Date: 2022-03-01
- Inventor: Chen-Hua Yu , An-Jhih Su , Jing-Cheng Lin , Po-Hao Tsai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L21/56 ; H01L25/00 ; H01L25/10 ; H01L23/552 ; H01L21/78 ; H01L23/31 ; H01L23/498 ; H01L23/00 ; H01L23/60 ; H01L23/538 ; H01L21/48

Abstract:
A chip package structure is provided. The chip package structure includes a redistribution structure including a dielectric structure, a redistribution line, and a seal ring structure. The redistribution line and the seal ring structure are in the dielectric structure, the seal ring structure continuously surrounds the redistribution line, the seal ring structure includes a first seal ring and a second seal ring over and electrically connected to the first seal ring, and the redistribution structure has a first sidewall, a first surface, and a second surface opposite to the first surface. The chip package structure includes a chip structure over the first surface. The chip package structure includes a ground bump over the second surface. The chip package structure includes a conductive shielding film covering the chip structure and the first sidewall of the redistribution structure.
Information query
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