Invention Grant
- Patent Title: CMOS structure and method for manufacturing CMOS structure
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Application No.: US16642723Application Date: 2019-03-04
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Publication No.: US11264384B2Publication Date: 2022-03-01
- Inventor: Zhi Wang , Feng Guan , Guangcai Yuan , Chen Xu , Lei Chen
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Armstrong Teasdale LLP
- International Application: PCT/CN2019/076871 WO 20190304
- International Announcement: WO2020/177057 WO 20200910
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/66 ; H01L29/786

Abstract:
The disclosure relates to a CMOS structure and a manufacturing method thereof. The CMOS structure includes a substrate and an N-type TFT and a P-type TFT on the substrate. The N-type TFT includes a first gate electrode, a first active layer, and a first gate dielectric layer therebetween. The first active layer includes a first semiconductor layer, a second semiconductor layer of the N-type, and a third semiconductor layer of the N-type which are located at opposite ends of the first semiconductor layer and sequentially stacked in a direction away from the first gate dielectric layer. An N-type doping concentration of the second semiconductor layer is smaller than that of the third semiconductor layer. The P-type TFT includes a fifth semiconductor layer and a sixth semiconductor layer. A P-type doping concentration of the fifth semiconductor layer is smaller than that of the sixth semiconductor layer.
Public/Granted literature
- US20210151435A1 CMOS STRUCTURE AND METHOD FOR MANUFACTURING CMOS STRUCTURE Public/Granted day:2021-05-20
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