Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16818742Application Date: 2020-03-13
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Publication No.: US11264403B2Publication Date: 2022-03-01
- Inventor: Yasuhito Yoshimizu
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-168684 20190917
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L23/528 ; H01L21/768 ; G11C16/04 ; H01L27/11524 ; H01L27/11529 ; H01L27/11565

Abstract:
According to one embodiment, a semiconductor memory device includes: first and second interconnect layers; a plurality of third interconnect layers stacked between the first and second interconnect layers; a first insulating layer passing through the plurality of third interconnect layers, and including one end that is in contact with a first face of the first interconnect layer; a first memory pillar including a first semiconductor layer passing through the plurality of third interconnect layers and a charge storage layer provided between the plurality of third interconnect layers and the first semiconductor layer. A distance between a third face of the first interconnect layer opposite to the first face and the second interconnect layer in the first direction, differs at a position corresponding to the first insulating layer from at positions corresponding to the third interconnect layers.
Public/Granted literature
- US20210082950A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-03-18
Information query
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