Invention Grant
- Patent Title: Graphene electrochemical transfer method assisted by multiple supporting films
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Application No.: US16648242Application Date: 2019-02-28
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Publication No.: US11264461B2Publication Date: 2022-03-01
- Inventor: Weier Lu , Yang Xia , Lili Zhao , Nan Li
- Applicant: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
- Current Assignee: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Priority: CN201811005282.9 20180830
- International Application: PCT/CN2019/076397 WO 20190228
- International Announcement: WO2020/042556 WO 20200305
- Main IPC: H01L29/16
- IPC: H01L29/16 ; C01B32/194 ; B32B37/00

Abstract:
Disclosed is a graphene electrochemical transfer method assisted by multiple supporting films, comprising: (1) growing graphene on a substrate, and then spin-coating a thin layer of photoresist on a surface of the graphene as a first film; (2) spin-coating n layers of thick, tough, and selectively dissolvable polymer films on the surface of the first film as an top film; (3) dissociating the multi-layer composite film and the graphene from the surface of the substrate by an electrochemical process, and dissolving the thick polymer films which is the top film with a first solvent; (4) after cleaning, transferring the thin first film and the graphene to a target substrate, and finally dissolving the thin first film away with a second solvent to complete the transfer process. This transfer process is fast, stable, and capable of transferring a large-size graphene, which may promote the large-scale application of graphene.
Public/Granted literature
- US20200235212A1 GRAPHENE ELECTROCHEMICAL TRANSFER METHOD ASSISTED BY MULTIPLE SUPPORTING FILMS Public/Granted day:2020-07-23
Information query
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