Invention Grant
- Patent Title: Phase change memory device
-
Application No.: US16671748Application Date: 2019-11-01
-
Publication No.: US11264569B2Publication Date: 2022-03-01
- Inventor: Injo Ok , Kevin W. Brew , Timothy M. Philip , Muthumanickam Sankarapandian , Sanjay C. Mehta , Nicole Saulnier , Steven M. Mcdermott
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00

Abstract:
A phase change material memory device is provided. The phase change material memory device includes one or more electrical contacts in a substrate, and a dielectric cover layer on the electrical contacts and substrate. The phase change material memory device further includes a lower conductive shell in a trench above one of the one or more electrical contacts, and an upper conductive shell on the lower conductive shell in the trench. The phase change material memory device further includes a conductive plug filling the upper conductive shell. The phase change material memory device further includes a liner layer on the dielectric cover layer and conductive plug, and a phase change material block on the liner layer on the dielectric cover layer and in the trench.
Public/Granted literature
- US20210135104A1 PHASE CHANGE MEMORY DEVICE Public/Granted day:2021-05-06
Information query
IPC分类: