Invention Grant
- Patent Title: Piezoelectric resonator with patterned resonant confiners
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Application No.: US16290873Application Date: 2019-03-02
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Publication No.: US11264970B2Publication Date: 2022-03-01
- Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02 ; H03H9/15
Abstract:
A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
Public/Granted literature
- US20200280300A1 Piezoelectric Resonaor with Patterned Resonant Confiners Public/Granted day:2020-09-03
Information query
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