Invention Grant
- Patent Title: Vacuum system for removing caustic particulate matter from various environments
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Application No.: US16427500Application Date: 2019-05-31
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Publication No.: US11266940B2Publication Date: 2022-03-08
- Inventor: Charles Vreugde , Robert Baldino
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: B01D46/00
- IPC: B01D46/00 ; B01D46/02 ; B01D46/10 ; B01D46/52

Abstract:
One illustrative system disclosed herein includes an upper filter, a lower filter positioned vertically below the upper filter, at least one incoming air inlet positioned vertically above the upper filter, and a vacuum pump positioned vertically below the lower filter, the vacuum pump including an outlet, wherein an incoming air stream is adapted to flow downwardly through the at least one incoming air inlet, then through the upper filter, then through the lower filter and then out of the outlet of the vacuum pump where it exits as a cleaned air stream.
Public/Granted literature
- US20200376423A1 VACUUM SYSTEM FOR REMOVING CAUSTIC PARTICULATE MATTER FROM VARIOUS ENVIRONMENTS Public/Granted day:2020-12-03
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