Polishing liquid and chemical mechanical polishing method
Abstract:
A polishing liquid used for chemical mechanical polishing includes colloidal silica, in which a zeta potential of the colloidal silica measured in a state where the colloidal silica is present in the polishing liquid is −20 mV or less, an electrical conductivity is 200 μS/cm or less, a pH is 2 to 6, and a transmittance is 70% to 99%.
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