Invention Grant
- Patent Title: Regulation plate, anode holder, and substrate holder
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Application No.: US16630369Application Date: 2018-07-06
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Publication No.: US11268207B2Publication Date: 2022-03-08
- Inventor: Naoki Shimomura , Mizuki Nagai
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP135370/2017 20170711
- International Application: PCT/JP2018/025622 WO 20180706
- International Announcement: WO2019/013111 WO 20190117
- Main IPC: H01L21/288
- IPC: H01L21/288 ; C25D17/06 ; C25D17/00
Abstract:
To partially or locally control a plating film thickness on a polygonal substrate. There is provided a regulation plate for adjusting a current between an anode and the polygonal substrate. This regulation plate includes a main body that has an edge forming a polygonal opening through which the current passes and an attachable/detachable shielding member to shield at least a part of the polygonal opening.
Public/Granted literature
- US20200157702A1 REGULATION PLATE, ANODE HOLDER, AND SUBSTRATE HOLDER Public/Granted day:2020-05-21
Information query
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