Invention Grant
- Patent Title: Electroplating system
-
Application No.: US16870290Application Date: 2020-05-08
-
Publication No.: US11268208B2Publication Date: 2022-03-08
- Inventor: Paul R McHugh , Gregory J Wilson , Kyle M Hanson , John L Klocke , Paul Van Valkenburg , Eric J Bergman , Adam Marc McClure , Deepak Saagar Kalaikadal , Nolan Layne Zimmerman , Michael Windham , Mikael R Borjesson
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Perkins Coie LLP
- Agent Kenneth H. Ohriner
- Main IPC: C25D17/12
- IPC: C25D17/12 ; C25D21/12 ; C25D5/08 ; C25D7/12 ; C25D17/00

Abstract:
An electroplating system has a vessel assembly holding an electrolyte. A weir thief electrode assembly in the vessel assembly includes a plenum inside of a weir frame. The plenum divided into at least a first, a second and a third virtual thief electrode segment. A plurality of spaced apart openings through the weir frame lead out of the plenum. A weir ring is attached to the weir frame and guides flow of current during electroplating. The electroplating system provides process determined radial and circumferential current density control and does not require changing hardware components during set up.
Public/Granted literature
- US20210348296A1 ELECTROPLATING SYSTEM Public/Granted day:2021-11-11
Information query