Invention Grant
- Patent Title: Electrochemical sensor, and a method of forming an electrochemical sensor
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Application No.: US16329664Application Date: 2017-08-29
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Publication No.: US11268927B2Publication Date: 2022-03-08
- Inventor: Alfonso Berduque , Helen Berney , William Allan Lane , Raymond J. Speer , Brendan Cawley , Donal McAuliffe , Patrick Martin McGuinness
- Applicant: Analog Devices International Unlimited Company
- Applicant Address: IE Limerick
- Assignee: Analog Devices International Unlimited Company
- Current Assignee: Analog Devices International Unlimited Company
- Current Assignee Address: IE Limerick
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/EP2017/071669 WO 20170829
- International Announcement: WO2018/041834 WO 20180308
- Main IPC: G01N27/407
- IPC: G01N27/407 ; G01N27/30

Abstract:
An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.
Public/Granted literature
- US20190195825A1 ELECTROCHEMICAL SENSOR, AND A METHOD OF FORMING AN ELECTROCHEMICAL SENSOR Public/Granted day:2019-06-27
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