Invention Grant
- Patent Title: Device and method for determining the concentration of a vapor
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Application No.: US16499211Application Date: 2018-03-22
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Publication No.: US11268934B2Publication Date: 2022-03-08
- Inventor: Arno Offermanns , Robert Bartholomeus Jacques Oligschlaeger
- Applicant: AIXTRON SE
- Applicant Address: DE Herzogenrath
- Assignee: AIXTRON SE
- Current Assignee: AIXTRON SE
- Current Assignee Address: DE Herzogenrath
- Agency: Ascenda Law Group, PC
- Priority: DE102017106967.4 20170331
- International Application: PCT/EP2018/057227 WO 20180322
- International Announcement: WO2018/177852 WO 20181004
- Main IPC: G01N29/036
- IPC: G01N29/036 ; C23C14/12 ; C23C14/54 ; G01N29/02

Abstract:
A device for determining the partial pressure or the concentration of a steam in a volume, includes a sensor body that can be oscillated. The temperature of the sensor body can be controlled to a temperature below the condensation temperature of the steam, and the oscillation frequency of the sensor body is influenced by a mass accumulation of the condensed steam on a surface of the sensor body. Means are provided for generating a gas flow from the sensor surface in the direction of the volume through a steam transport channel that adjoins a window to the volume. In order to increase the maximum service life of the sensor body, the means for generating a gas flow has a slit nozzle designed as an annular channel.
Public/Granted literature
- US20200033294A1 DEVICE AND METHOD FOR DETERMINING THE CONCENTRATION OF A VAPOR Public/Granted day:2020-01-30
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