Invention Grant
- Patent Title: Inspection apparatus and inspection method for inspecting electrical characteristic of electronic device
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Application No.: US16575552Application Date: 2019-09-19
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Publication No.: US11269004B2Publication Date: 2022-03-08
- Inventor: Jun Fujihara
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2018-176444 20180920
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
An inspection apparatus configured to inspect a target object includes a placing device configured to place the target object thereon; a heater provided in the placing device and configured to adjust a temperature of the placing device; and a position adjusting mechanism configured to hold the placing device on which the target object is placed, and configured to perform a position adjustment between the target object placed on the placing device and a terminal to be brought into contact with the target object when an inspection of an electrical characteristic is performed. The placing device is configured to be separated from the position adjusting mechanism when the inspection of the electrical characteristic is performed. A heat sink having prominences and depressions is provided at a portion of the placing device except a holding target portion thereof which is to be held by the position adjusting mechanism.
Public/Granted literature
- US20200096557A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2020-03-26
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