Piezoelectric sensor controllers may facilitate detection and identification of various potential fault states with parameter measurements. In an illustrative embodiment of a piezoelectric-based sensor having response-parameter-based fault diagnosis, the sensor includes a piezoelectric transducer and a controller. The controller drives the piezoelectric transducer to generate bursts of acoustic energy and, based on a response of the piezoelectric transducer to said driving, identifies a corresponding transducer state from a set of potential states including multiple transducer fault states. An illustrative embodiment of a sensing method having fault diagnosis, the method includes: driving a piezoelectric transducer to generate a burst of acoustic energy; monitoring a response of the piezoelectric transducer to said driving; identifying, based on said response, a corresponding transducer state from a set of potential states including multiple transducer fault states; and if the transducer state is a fault state, reporting that fault state.