- Patent Title: Photo resist as opaque aperture mask on multispectral filter arrays
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Application No.: US16129309Application Date: 2018-09-12
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Publication No.: US11269120B2Publication Date: 2022-03-08
- Inventor: Kevin R. Downing
- Applicant: Materion Corporation
- Applicant Address: US OH Mayfield Heights
- Assignee: Materion Corporation
- Current Assignee: Materion Corporation
- Current Assignee Address: US OH Mayfield Heights
- Agency: Tucker Ellis LLP
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G02B5/20 ; G03F7/20 ; G03F7/00 ; G03F7/038 ; G03F7/039

Abstract:
An apparatus (e.g., a multi-spectral optical filter array, an optical wafer, an optical component) has an aperture mask printed directly thereon, the aperture mask including a positive or negative photoresist. The apparatus includes a substrate having the aperture mask printed on at least one of a light entrance surface or a light exit surface of the substrate so as to provide an aperture over a portion of the substrate. The photoresist from which the aperture mask is formed is photo-definable or non-photo-definable, and is deposited/printed to form the aperture mask on the substrate.
Public/Granted literature
- US20190079226A1 PHOTO RESIST AS OPAQUE APERTURE MASK ON MULTISPECTRAL FILTER ARRAYS Public/Granted day:2019-03-14
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