Invention Grant
- Patent Title: Base conducting layer beneath graphite layer of ceramic cathode for use with cathodic arc deposition
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Application No.: US16583121Application Date: 2019-09-25
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Publication No.: US11270872B2Publication Date: 2022-03-08
- Inventor: Cherngye Hwang , Reimar Azupardo , Randall Simmons , Mary Agnes Gupit Perez
- Applicant: Western Digital Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Western Digital Technologies, Inc.
- Current Assignee: Western Digital Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Loza & Loza, LLP
- Agent Gabriel Fitch
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/06 ; C23C14/54 ; C23C14/32 ; G11B5/85

Abstract:
Cathode structures are disclosed for use with pulsed cathodic arc deposition systems for forming diamond-like carbon (DLC) films on devices, such as on the sliders of hard disk drives. In illustrative examples, a base layer composed of an electrically- and thermally-conducting material is provided between the ceramic substrate of the cathode and a graphitic paint outer coating, where the base layer is a silver-filled coating that adheres to the ceramic rod and the graphitic paint. The base layer is provided, in some examples, to achieve and maintain a relatively low resistance (and hence a relatively high conductivity) within the cathode structure during pulsed arc deposition to avoid issues that can result from a loss of conductivity within the graphitic paint over time as deposition proceeds. Examples of suitable base material compounds are described herein where, e.g., the base layer can withstand temperatures of 1700° F. (927° C.).
Public/Granted literature
- US20210090862A1 BASE CONDUCTING LAYER BENEATH GRAPHITE LAYER OF CERAMIC CATHODE FOR USE WITH CATHODIC ARC DEPOSITION Public/Granted day:2021-03-25
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