- Patent Title: Germanium on insulator for CMOS imagers in the short wave infrared
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Application No.: US16762944Application Date: 2019-02-11
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Publication No.: US11271028B2Publication Date: 2022-03-08
- Inventor: Uriel Levy , Omer Kapach , Avraham Bakal , Assaf Lahav , Edward Preisler
- Applicant: TriEye Ltd.
- Applicant Address: IL Tel-Aviv
- Assignee: TriEye Ltd.
- Current Assignee: TriEye Ltd.
- Current Assignee Address: IL Tel-Aviv
- Agency: Nathan & Associates
- Agent Menachem Nathan
- International Application: PCT/IB2019/051086 WO 20190211
- International Announcement: WO2019/155435 WO 20190815
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/18

Abstract:
Light detecting structures comprising germanium (Ge) photodiodes formed in a device layer of a germanium on-insulator (GeOI) wafer, focal planes arrays based on such Ge photodiodes (PDs) and methods for fabricating such Ge photodiodes and focal plane arrays (FPAs). An FPA includes a Ge-on-GeOI PD array bonded to a ROIC where the handle layer of the GeOI layer is removed. The GeOI insulator properties and thickness can be designed to improve light coupling into the PDs.
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