Invention Grant
- Patent Title: Method for forming fin field effect transistor (FINFET) device structure with conductive layer between gate and gate contact
-
Application No.: US16663085Application Date: 2019-10-24
-
Publication No.: US11271112B2Publication Date: 2022-03-08
- Inventor: Chao-Hsun Wang , Kuo-Yi Chao , Rueijer Lin , Chen-Yuan Kao , Mei-Yun Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L21/768 ; H01L29/66 ; H01L23/535 ; H01L29/417 ; H01L29/45

Abstract:
A method for forming a FinFET device structure is provided. The method includes forming a fin structure over a substrate and forming a gate dielectric layer over the fin structure. The method also includes forming a gate electrode layer over the gate dielectric layer and forming a source/drain (S/D) structure adjacent to the gate electrode layer. In addition, the method includes forming an S/D contact structure over the S/D structure. The method also includes forming a first conductive layer in direct with the gate electrode layer. A bottom surface of the first conductive layer is lower than a top surface of the gate dielectric layer. The method further includes forming a second conductive layer over the first conductive layer. The gate electrode layer is electrically connected to the second conductive layer by the first conductive layer.
Public/Granted literature
Information query
IPC分类: