Invention Grant
- Patent Title: Phase change memory using multiple phase change layers and multiple heat conductors
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Application No.: US16438906Application Date: 2019-06-12
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Publication No.: US11271151B2Publication Date: 2022-03-08
- Inventor: Injo Ok , Balasubramanian Pranatharthiharan , Kevin W. Brew , Wei Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00

Abstract:
A method is presented for reducing a reset current for a phase change memory (PCM). The method includes forming a bottom electrode, constructing a PCM cell structure including a plurality of phase change memory layers and a plurality of heat transfer layers, wherein the plurality of phase change memory layers are assembled in an alternating configuration with respect to the plurality of heat transfer layers, and forming a top electrode over the PCM cell structure. The plurality of phase change memory layers are arranged perpendicular to the top and bottom electrodes. Additionally, airgaps are defined adjacent the PCM cell structure.
Information query
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