Invention Grant
- Patent Title: Robust dual membrane microphone
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Application No.: US16995360Application Date: 2020-08-17
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Publication No.: US11272296B2Publication Date: 2022-03-08
- Inventor: Pirmin Hermann Otto Rombach
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Priority: DE102019123077.2 20190828
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; H04R3/00 ; H04R19/00

Abstract:
A dual membrane microphone is disclosed. In an embodiment, a MEMS microphone includes a first membrane, a backplate with a separated central area including a first backplate electrode on a lower portion of the backplate, a second backplate electrode on a upper portion of the backplate and a backplate insulation layer galvanically isolating the first and the second backplate electrodes, a second membrane and a coupling central portion, wherein the first membrane couples mechanically to the separated central area of the backplate in an electrically isolating manner and the separated central area of the backplate couples to the second membrane in an electrically isolating manner.
Public/Granted literature
- US20210067882A1 Robust Dual Membrane Microphone Public/Granted day:2021-03-04
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