Invention Grant
- Patent Title: Liquid supply system with improved bubble venting capacity
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Application No.: US16522046Application Date: 2019-07-25
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Publication No.: US11273396B2Publication Date: 2022-03-15
- Inventor: Y. L. Huang , Chin-Kun Fang , Li-Jen Wu , Yu Kai Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: B01D35/02
- IPC: B01D35/02 ; B01D19/00 ; H01L21/67 ; B01D19/02

Abstract:
A system for dispensing a liquid includes a filter adapted to filter a liquid and to provide a filtered liquid at a liquid outlet of the filter, and a tank having a liquid inlet coupled to the liquid outlet of the filter via a first pipe. The tank includes an upper portion having a first lateral dimension and a lower portion having a second lateral dimension less than the first lateral dimension. The upper portion of the tank is above the liquid inlet of the tank.
Public/Granted literature
- US20200070195A1 LIQUID SUPPLY SYSTEM WITH IMPROVED BUBBLE VENTING CAPACITY Public/Granted day:2020-03-05
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