Invention Grant
- Patent Title: Mono-substituted cyclopentadienes and metal cyclopentadienyl complexes and synthesis methods thereof
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Application No.: US16992721Application Date: 2020-08-13
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Publication No.: US11274069B2Publication Date: 2022-03-15
- Inventor: Grigory Nikiforov
- Applicant: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Applicant Address: FR Paris
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee Address: FR Paris
- Agent Yan Jiang
- Main IPC: C07C17/093
- IPC: C07C17/093 ; B01J31/02 ; C07C17/38 ; C07C22/02
Abstract:
Disclosed are mono-substituted cyclopentadienes, metal cyclopentadienyl complexes and methods for synthesizing them. The disclosed mono-substituted cyclopentadienes are synthesized by a selective catalytic carbon-carbon coupling reaction. The disclosed metal cyclopentadienyl complexes are synthesized from the disclosed mono-substituted cyclopentadienes. The disclosed metal cyclopentadienyl complexes include main group metal and transition metal cyclopentadienyl complexes, and may be used as deposition precursors contained in film forming compositions for film depositions in semiconductor industry, such as ALD, CVD, SOD, etc.
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