Invention Grant
- Patent Title: Film forming apparatus, film forming method, and method of manufacturing article
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Application No.: US16597950Application Date: 2019-10-10
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Publication No.: US11275309B2Publication Date: 2022-03-15
- Inventor: Hiroshi Kurosawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JPJP2018-192812 20181011
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/16 ; G03F7/26

Abstract:
A film forming apparatus for forming a film on a substrate includes a driver configured to bring a curable composition arranged on the substrate and a flat surface into contact with each other, a heater configured to heat the curable composition by electromagnetic waves to reduce the viscosity of the curable composition and make the curable composition conform to the flat surface, and a curing device configured to form a film made of a cured product of the curable composition by curing the curable composition in a state in which the curable composition conforms to the flat surface.
Information query
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