Invention Grant
- Patent Title: Automated inspection system and automated inspection method including a data collection device that generates exposure parameter determination information
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Application No.: US16637360Application Date: 2018-06-06
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Publication No.: US11276155B2Publication Date: 2022-03-15
- Inventor: Jumpei Honda , Takuma Nishimura , Hiroshige Kashiwabara
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JPJP2017-175507 20170913
- International Application: PCT/JP2018/021672 WO 20180606
- International Announcement: WO2019/053969 WO 20190321
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G08C19/36 ; H04Q9/02

Abstract:
There are provided an automatic inspection system and an automatic inspection method capable of suppressing power consumption of a measurement device. A measurement device includes a sensor unit 11 that measures an inspection target 3, a parameter management unit 13 that determines a predetermined parameter set for the sensor unit based on parameter determination information received from a data collection device 2, and a measurement data generation unit 12 that generates measurement data by analyzing data obtained by the sensor unit measuring the inspection target by using the predetermined parameter. The data collection device includes a parameter determination information generation unit 23 that generates parameter determination information, and a measurement data acquisition unit 21 that specifies the parameter determination information for the measurement device, requests the measurement device to acquire the measurement data, and stores the measurement data acquired from the measurement device.
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