Automated inspection system and automated inspection method including a data collection device that generates exposure parameter determination information
Abstract:
There are provided an automatic inspection system and an automatic inspection method capable of suppressing power consumption of a measurement device. A measurement device includes a sensor unit 11 that measures an inspection target 3, a parameter management unit 13 that determines a predetermined parameter set for the sensor unit based on parameter determination information received from a data collection device 2, and a measurement data generation unit 12 that generates measurement data by analyzing data obtained by the sensor unit measuring the inspection target by using the predetermined parameter. The data collection device includes a parameter determination information generation unit 23 that generates parameter determination information, and a measurement data acquisition unit 21 that specifies the parameter determination information for the measurement device, requests the measurement device to acquire the measurement data, and stores the measurement data acquired from the measurement device.
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