Invention Grant
- Patent Title: Fixture for vapor deposition system
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Application No.: US16836337Application Date: 2020-03-31
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Publication No.: US11276556B2Publication Date: 2022-03-15
- Inventor: James W. Neal , Michael J. Maloney , Kevin W. Schlichting , David A. Litton
- Applicant: United Technologies Corporation
- Applicant Address: US CT Farmington
- Assignee: United Technologies Corporation
- Current Assignee: United Technologies Corporation
- Current Assignee Address: US CT Farmington
- Agency: Kinney & Lange, P.A.
- Main IPC: H01J37/30
- IPC: H01J37/30 ; G01K1/14 ; G01K7/02 ; G01K13/08 ; C23C14/50 ; C23C14/24 ; C23C14/54 ; G01N25/00 ; H01J37/317 ; C23C14/30

Abstract:
A vapor deposition system fixture comprises an arm, a rake, a crown gear bearing assembly, a workpiece holder, a thermocouple, and a contact ring assembly. The crown gear bearing assembly is attached to and rotatably engaged with the rake and includes stationary portion and rotating portions. The workpiece holder is configured to rotate with the rotating portion. The thermocouple is configured to rotate with the workpiece holder. The contact ring assembly comprises a housing, a cover, first and second rotating contact rings, and first and second stationary contact rings. The housing is attached to at least one of the arm and the rake. The first and second rotating contact rings are electrically connected to the thermocouple. The first and second stationary contact rings surround the rotating ring. The first and second stationary contact rings are configured to receive an electrical signal from the first and second rotating contact rings.
Public/Granted literature
- US20200227234A1 FIXTURE FOR VAPOR DEPOSITION SYSTEM Public/Granted day:2020-07-16
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