Invention Grant
- Patent Title: Recessed composite capacitor
-
Application No.: US16579661Application Date: 2019-09-23
-
Publication No.: US11276684B2Publication Date: 2022-03-15
- Inventor: Yi-Huan Chen , Chien-Chih Chou , Alexander Kalnitsky , Kong-Beng Thei
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L27/06 ; H01L29/66 ; H01L29/78 ; H01L49/02 ; H01L21/8234 ; H01L23/522 ; H01L21/762

Abstract:
Some embodiments relate to an integrated circuit (IC) that includes a semiconductor substrate. A shallow trench isolation region downwardly extends into the frontside of the semiconductor substrate and is filled with dielectric material. A first capacitor plate and a second capacitor plate are disposed in the shallow trench isolation region. The first capacitor plate and the second capacitor plate have first and second sidewall structures, respectively, that are substantially parallel to one another and that are separated from one another by the dielectric material of the shallow trench isolation region.
Public/Granted literature
- US20200381420A1 RECESSED COMPOSITE CAPACITOR Public/Granted day:2020-12-03
Information query
IPC分类: