Invention Grant
- Patent Title: Semiconductor device, apparatus, and method for producing semiconductor device
-
Application No.: US16597973Application Date: 2019-10-10
-
Publication No.: US11276723B2Publication Date: 2022-03-15
- Inventor: Takumi Ogino , Hideaki Ishino , Akihiro Shimizu , Katsunori Hirota , Tsutomu Tange
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JPJP2018-197131 20181019
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00 ; H01L23/60 ; H01L23/58

Abstract:
A semiconductor device comprising: a substrate; a semiconductor layer; and a wiring structure section between the substrate and the semiconductor layer, the wiring structure section including a plurality of stacked wiring layers and a plurality of stacked insulating films, the wiring structure section including an electrode, wherein an opening for connecting a member to the electrode is formed in the semiconductor layer and the wiring structure section; the semiconductor layer has an isolation region in which an insulating film is embedded and which surrounds the opening; the wiring structure section has a ring which is formed of the plurality of wiring layers and surround the opening; and a distance between the opening and the ring closest to the opening is larger than a distance between the opening and the isolation region closest to the opening.
Information query
IPC分类: