Invention Grant
- Patent Title: Semiconductor memory devices formed using selective barrier metal removal
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Application No.: US16576974Application Date: 2019-09-20
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Publication No.: US11276732B2Publication Date: 2022-03-15
- Inventor: Takashi Ando , Hiroyuki Miyazoe
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Robert Sullivan
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/24 ; G11C13/00 ; H01L45/00

Abstract:
A method for manufacturing a semiconductor memory device includes depositing a bottom metal line layer on a dielectric layer, and patterning the bottom metal line layer into a plurality of bottom metal lines spaced apart from each other. In the method, a plurality of switching element dielectric portions are formed on respective ones of the plurality of bottom metal lines, and a top metal line layer is deposited on the plurality of switching element dielectric portions. The method further includes patterning the top metal line layer into a plurality of top metal lines spaced apart from each other. The plurality of top metal lines are oriented perpendicular to the plurality of bottom metal lines.
Public/Granted literature
- US20210091141A1 CONDUCTIVE BRIDGING RANDOM ACCESS MEMORY FORMED USING SELECTIVE BARRIER METAL REMOVAL Public/Granted day:2021-03-25
Information query
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