Invention Grant
- Patent Title: Cleaning compositions
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Application No.: US16923535Application Date: 2020-07-08
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Publication No.: US11279903B2Publication Date: 2022-03-22
- Inventor: Thomas Dory , Mick Bjelopavlic , Joshua Guske , Kazutaka Takahashi
- Applicant: Fujifilm Electronic Materials U.S.A., Inc.
- Applicant Address: US RI N. Kingstown
- Assignee: Fujifilm Electronic Materials U.S.A., Inc.
- Current Assignee: Fujifilm Electronic Materials U.S.A., Inc.
- Current Assignee Address: US RI N. Kingstown
- Agency: Fish & Richardson P.C.
- Main IPC: C11D7/34
- IPC: C11D7/34 ; C11D7/32 ; C11D7/06 ; H01L21/02 ; C11D7/26

Abstract:
This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one alkylsulfonic acid or a salt thereof, the alkylsulfonic acid containing an alkyl group substituted by OH or NH2; and 3) at least one aminoalcohol.
Public/Granted literature
- US20200332231A1 Cleaning Compositions Public/Granted day:2020-10-22
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