Invention Grant
- Patent Title: Cleaning liquid composition
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Application No.: US16473625Application Date: 2017-12-26
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Publication No.: US11279904B2Publication Date: 2022-03-22
- Inventor: Kikue Morita , Areji Takanaka , Takuo Ohwada
- Applicant: Kanto Kagaku Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Kanto Kagaku Kabushiki Kaisha
- Current Assignee: Kanto Kagaku Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: JPJP2016-254312 20161227
- International Application: PCT/JP2017/046737 WO 20171226
- International Announcement: WO2018/124109 WO 20180705
- Main IPC: C11D11/00
- IPC: C11D11/00 ; C11D3/28 ; C11D3/30 ; C11D3/33 ; C11D3/36 ; C11D17/00 ; C23G1/20 ; H01L21/02 ; H01L21/321 ; H01L23/532

Abstract:
Provided is a cleaning liquid composition which is useful for cleaning of a substrate or the like that has been subjected to a chemical mechanical polishing (CMP) process, etc in the production steps of an electronic device such as a semiconductor element. A cleaning liquid composition according to the present invention is used for the purpose of cleaning a substrate that has a Cu wiring, and comprises one or more basic compounds and one or more nitrogen-containing monocyclic heterocyclic aromatic compounds that contain one or more carboxyl groups or ester groups, provided that in cases where one or more amino groups are contained therein, only amino groups directly bonded to a nitrogen-containing heterocyclic rind are contained. This cleaning liquid composition has a hydrogen ion concentration (pH) of 8-12.
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