Invention Grant
- Patent Title: Substrate loading in an ALD reactor
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Application No.: US16165303Application Date: 2018-10-19
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Publication No.: US11280001B2Publication Date: 2022-03-22
- Inventor: Vaino Kilpi , Juhana Kostamo , Wei-Min Li
- Applicant: Picosun Oy
- Applicant Address: FI Espoo
- Assignee: Picosun Oy
- Current Assignee: Picosun Oy
- Current Assignee Address: FI Espoo
- Agency: Ziegler IP Law Group, LLC
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/677 ; H01L21/687 ; C23C16/458

Abstract:
An apparatus and method for loading a plurality of substrates into a substrate holder in a loading chamber of a deposition reactor to form a vertical stack of horizontally oriented substrates within said substrate holder, for turning the substrate holder to form a horizontal stack of vertically oriented substrates, and for lowering the substrate holder into a reaction chamber of the deposition reactor for deposition. The technical effects achieved are: a top loading system for a vertical flow deposition reactor in which the substrates can be loaded with horizontal orientation, eliminating the need for flipping each substrate separately by flipping the whole substrate holder and minimizing a loading distance in a reactor cluster.
Public/Granted literature
- US20190048465A1 SUBSTRATE LOADING IN AN ALD REACTOR Public/Granted day:2019-02-14
Information query
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