Invention Grant
- Patent Title: Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate
-
Application No.: US16696709Application Date: 2019-11-26
-
Publication No.: US11280611B2Publication Date: 2022-03-22
- Inventor: Daniele Prati , Carlo Valzasina , Luca Giuseppe Falorni , Matteo Fabio Brunetto
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102015000013011 20150424
- Main IPC: G01C19/5733
- IPC: G01C19/5733 ; G01C19/5747 ; G01C19/5762

Abstract:
A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
Information query