Invention Grant
- Patent Title: MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
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Application No.: US16829413Application Date: 2020-03-25
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Publication No.: US11280613B2Publication Date: 2022-03-22
- Inventor: Farrokh Ayazi , Haoran Wen
- Applicant: GEORGIA TECH RESEARCH CORPORATION
- Applicant Address: US GA Atlanta
- Assignee: GEORGIA TECH RESEARCH CORPORATION
- Current Assignee: GEORGIA TECH RESEARCH CORPORATION
- Current Assignee Address: US GA Atlanta
- Agency: Burns & Levinson LLP
- Agent Bruce D. Jobse
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01P15/125 ; G01P15/097 ; G01C19/5642 ; G01P15/08 ; G01D5/241
Abstract:
An inertial measurement apparatus has mechanically bendable beams that have an isosceles trapezoid cross-section. The apparatus has a resonant member having a perimeter at least partially defined by a sidewall slanted at a first angular value and at least one electrode disposed adjacent, and parallel, to the sidewall and separated therefrom by a capacitive gap.
Public/Granted literature
- US20200225037A1 MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR QUADRATURE TUNING Public/Granted day:2020-07-16
Information query
IPC分类:
