Invention Grant
- Patent Title: Thin film thermal mass flow sensor in fluid applications
-
Application No.: US16829339Application Date: 2020-03-25
-
Publication No.: US11280651B2Publication Date: 2022-03-22
- Inventor: Henry M. Halimi
- Applicant: Flo Technologies, Inc.
- Applicant Address: US CA Culver City
- Assignee: Flo Technologies, Inc.
- Current Assignee: Flo Technologies, Inc.
- Current Assignee Address: US CA Culver City
- Agency: Hackler Daghighian Martino & Novak
- Main IPC: G01F1/692
- IPC: G01F1/692 ; G01F1/684 ; G01F1/69 ; G01F1/68

Abstract:
A flow sensor configured to detect a fluid flow of a liquid inside a pipe portion is disclosed. A thin film thermal mass flow sensor has a substrate defining a thickness from an upper side opposite a bottom side. The upper side of the substrate supports a resistive heating circuit, a first temperature sensor circuit and a second temperature sensor circuit. The resistive heating circuit is disposed between the first and second temperature sensor circuits. The circuits are electrically connected respectively to a plurality of leadwires configured to be attachable to electronic equipment. A thermally conductive membrane is configured to separate the fluid flow of the liquid inside the pipe portion from the thin film thermal mass flow sensor. A thermally conductive bond connects the bottom side of the substrate of the thin film thermal mass flow sensor to the thermally conductive membrane.
Public/Granted literature
- US20200309582A1 THIN FILM THERMAL MASS FLOW SENSOR IN FLUID APPLICATIONS Public/Granted day:2020-10-01
Information query