Invention Grant
- Patent Title: Monitoring system and method of monitoring static charge
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Application No.: US16883947Application Date: 2020-05-26
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Publication No.: US11280823B2Publication Date: 2022-03-22
- Inventor: Shin-Ta Wu , Chwen Yu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: G01R29/12
- IPC: G01R29/12 ; G01R31/00

Abstract:
A monitoring system is provided. The monitoring system includes a non-conductive tube, a conductive tape, a metallic plate, and an electrostatic field meter. The non-conductive tube includes an outer surface. The conductive tape is wrapped around the outer surface of the non-conductive tube. The metallic plate contacts and extends away from the conductive tape. The electrostatic field meter is disposed a predetermined distance away from the metallic plate, and a static charge of the metallic plate is detectable by the electrostatic field meter. A method of monitoring static charge is also provided.
Public/Granted literature
- US20210123963A1 MONITORING SYSTEM AND METHOD OF MONITORING STATIC CHARGE Public/Granted day:2021-04-29
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