Invention Grant
- Patent Title: Method for forming pattern by using photo-nanoimprint technology, imprint apparatus, and curable composition
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Application No.: US16552815Application Date: 2019-08-27
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Publication No.: US11281097B2Publication Date: 2022-03-22
- Inventor: Toshiki Ito , Tomonori Otani , Niyaz Khusnatdinov
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
A method for forming a pattern by using a photo-nanoimprint process includes performing, on each of a plurality of shot areas on a surface of a substrate: a step (1) of dispensing liquid droplets of a curable composition (A) dropwise discretely; a step (2) of bringing the curable composition (A) and a mold into contact with each other; a step (3) of irradiating the curable composition (A) with light; and a step (4) of releasing the mold from a cured product of the curable composition (A), in which when steps from the step (2) to the step (4) are collectively called an imprinting step (Im), before the imprinting step (Im) is performed on one shot area on which the step (1) has already been performed out of the plurality of shot areas, the step (1) is performed on another shot area selected from the plurality of shot areas.
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