Invention Grant
- Patent Title: Fluorine-containing monomer, fluorine-containing polymer, pattern forming composition using same, and pattern forming method of same
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Application No.: US16616012Application Date: 2018-05-28
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Publication No.: US11281102B2Publication Date: 2022-03-22
- Inventor: Yuzuru Kaneko , Tsubasa Itakura , Ryo Nadano
- Applicant: Central Glass Company, Limited
- Applicant Address: JP Ube
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube
- Agency: Crowell & Moring LLP
- Priority: JPJP2017-111208 20170605,JPJP2018-099306 20180524
- International Application: PCT/JP2018/020270 WO 20180528
- International Announcement: WO2018/225549 WO 20181213
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/004 ; C07D307/04 ; C08F20/02

Abstract:
Provided is a fluorine-containing polymer which has no perfluoroalkyl group of 4 or more carbon atoms and which, when formed together with a photoacid generator into a film, shows water repellency after film formation, but becomes hydrophilic by the action of an acid generated under light irradiation, and thus serves as a pattern forming material capable of forming a film with high sensitivity and resolution. A fluorine-containing polymer according to the present invention has a repeating unit of the formula (1) where R1 is a hydrogen atom, a fluorine atom or a C1-C10 alkyl group; R2 to R5 are each independently a hydrogen atom or a C1-C10 alkyl group; X is a single bond or a divalent group; Y is a C1-C3 fluoroalkyl or carboxylate (—COOR) group; R is a C1-C3 fluoroalkyl group; and seven or less of hydrogen atoms contained in the substituent group may be substituted with fluorine.
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